Ex situ prepared Si nanocrystals embedded in silica glass:: Formation and characterization

被引:66
作者
Svrcek, V [1 ]
Slaoui, A [1 ]
Muller, JC [1 ]
机构
[1] CNRS, Lab PHASE, UPR 292, F-67037 Strasbourg, France
关键词
D O I
10.1063/1.1649817
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this article we present an alternative approach for the fabrication of silicon nanocrystals (Si-nc) prepared ex situ of the silicon dioxide (SiO(2)) host matrix. The Si-nc are scratched from porous silicon layers and incorporated into a host spin-on-glass SiO(2) based matrix. High-resolution transmission electron microscopy and Raman spectroscopy revealed Si-nc of 2-5 nm size. These nanocrystallites exhibit visible room temperature photoluminescence (PL) with a maximum at about 700 nm. The presence of the dopant in the host matrix is shown to induce a blueshift of the PL maxima due to modified surface states of the Si-nc. This approach allows the fabrication of self-supporting samples with very high Si-nc concentrations. A bright photoluminescence at room temperature is obtained on such materials. Finally, strong indication of optical gain at room temperature is shown for samples with high Si-nc concentrations in a phosphorus doped sol gel host matrix. (C) 2004 American Institute of Physics.
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页码:3158 / 3163
页数:6
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