Spatially dependent kinetics of electrons and excited atoms in the column plasma of a He-Xe dc discharge

被引:17
作者
Lange, H
Leipold, F
Otte, M
Pfau, S
Uhrlandt, D
机构
[1] Inst Niedertemp Plasmaphys, D-17489 Greifswald, Germany
[2] Univ Greifswald, Inst Phys, Greifswald, Germany
关键词
space-dependent Boltzmann equation; electron velocity distribution function; positive column; dc glow discharge;
D O I
10.1023/A:1021647810108
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
The radially varying kinetics of electrons and excited atoms in the cylindrical axially homogeneous positive column of a dr glow discharge in a gas mixture of helium and 2% xenon was studied. The experimental investigations comprise the radially resolved measurements of the isotropic parr of the electron velocity distribution function (EVDF) using a single-probe technique and of the densities of atoms in the lower excited states by using a laser diode absorption method. The theoretical investigations are based on the solution of the space-dependent kinetic equation for the EVDF and the balance equations of excited gas atoms. Besides a strict solution, various simplified treatments of the electron kinetics as the conventional homogeneous approach and the nonlocal approach have been applied. The electron kinetic behavior in the helium-xenon column plasma changes remarkably with increasing helium gas pressure from a distinctly nonlocal behavior at a low pressure of 100 Pa to a nearly local behavior at a medium pressure of 600 Pa.
引用
收藏
页码:255 / 284
页数:30
相关论文
共 40 条
[1]   Self-contained solution to the spatially inhomogeneous electron Boltzmann equation in a cylindrical plasma positive column [J].
Alves, LL ;
Gousset, G ;
Ferreira, CM .
PHYSICAL REVIEW E, 1997, 55 (01) :890-906
[2]  
Aymar M., 1978, Atomic Data and Nuclear Data Tables, V21, P537, DOI 10.1016/0092-640X(78)90007-4
[3]   Self-consistent model of a positive column in an inert gas discharge at low pressures and small currents [J].
Behnke, J ;
Golubovsky, YB ;
Nisimov, SU ;
Porokhova, IA .
CONTRIBUTIONS TO PLASMA PHYSICS, 1996, 36 (01) :75-91
[4]  
BERNSTEIN IB, 1954, PHYS REV, V94, P1472
[5]  
BOWERING N, 1986, J CHEM PHYS, V84, P715, DOI 10.1063/1.450568
[6]   NUMERICAL-SOLUTION OF THE SPATIALLY INHOMOGENEOUS BOLTZMANN-EQUATION AND VERIFICATION OF THE NONLOCAL APPROACH FOR ARGON PLASMA [J].
BUSCH, C ;
KORTSHAGEN, U .
PHYSICAL REVIEW E, 1995, 51 (01) :280-288
[7]  
DEVYATOV AM, 1981, P INT UN PUR APPL 1, P399
[8]   RADIALLY DEPENDENT SOLUTIONS OF BOLTZMANN-EQUATION IN LOW-TEMPERATURE PLASMAS USING A MODIFIED 2-TERM EXPANSION [J].
HARTIG, MJ ;
KUSHNER, MJ .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) :1080-1090
[9]  
HAYES E, 1965, BEITR PLASMAPHYS, V5, P59
[10]  
Herrman D., 1971, BEITR PLASMAPHYS, V11, P85