In situ Raman monitoring of ultrathin Ge films

被引:24
作者
Kanakaraju, S [1 ]
Sood, AK
Mohan, S
机构
[1] Indian Inst Sci, Dept Instrumentat, Bangalore 560012, Karnataka, India
[2] Indian Inst Sci, Dept Phys, Bangalore 560012, Karnataka, India
[3] Cent Sci Instruments Org, Chandigarh, India
关键词
D O I
10.1063/1.368866
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the in situ interference enhanced Raman spectroscopy of ultrathin crystalline Ge films grown at 300 degrees C. The Raman spectra of the films show a peak at similar to 290 cm(-1) attributed to the confined optical phonon and a broadband on the low-frequency side at similar to 254 cm(-1) for 5 and 10 Angstrom thick films. The latter is attributed to disordered surface with large number of dangling bonds. For thicker films, the low-frequency mode appears at 270 cm(-1) assigned to surface optical phonons. (C) 1998 American Institute of Physics. [S0021-8979(98)07522-7]
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页码:5756 / 5760
页数:5
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