The atmospheric-pressure plasma jet:: A review and comparison to other plasma sources

被引:1126
作者
Schütze, A [1 ]
Jeong, JY
Babayan, SE
Park, J
Selwyn, GS
Hicks, RF
机构
[1] Univ Calif Los Angeles, Dept Chem Engn, Los Angeles, CA 90095 USA
[2] Univ Calif Los Alamos Natl Lab, Los Alamos, NM 87545 USA
关键词
atmospheric pressure; corona discharge; dielectric barrier discharge; plasma jet; plasma torch; thermal and nonthermal plasmas; transferred arc;
D O I
10.1109/27.747887
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Atmospheric-pressure plasmas are used in a variety of materials processes. Traditional sources include transferred arcs, plasma torches, corona discharges, and dielectric barrier discharges, In arcs and torches, the electron and neutral temperatures exceed 3000 degrees C and the densities of charge species range from 10(16)-10(19) cm(-3). Due to the high gas temperature, these plasmas are used primarily in metallurgy. Corona and dielectric barrier discharges produce nonequilibrium plasmas with gas temperatures between 50-400 degrees C and densities of charged species typical of weakly ionized gases. However, since these discharges are nonuniform, their use in materials processing is limited. Recently, an atmospheric-pressure plasma jet has been developed, which exhibits many characteristics of a conventional, low-pressure glow discharge. In the jet, the gas temperature ranges from 25-200 degrees C, charged-particle densities are 10(11)-10(12) cm(-3), and reactive species are present in high concentrations, i.e., 10-100 ppm. Since this source may be scaled to treat large areas, it could be used in applications which have been restricted to vacuum, In this paper, the physics and chemistry of the plasma jet and other atmospheric-pressure sources are reviewed.
引用
收藏
页码:1685 / 1694
页数:10
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