Microscopic theory of electromigration on semiconductor surfaces

被引:120
作者
Kandel, D [1 ]
Kaxiras, E [1 ]
机构
[1] HARVARD UNIV,DIV APPL SCI,CAMBRIDGE,MA 02138
关键词
D O I
10.1103/PhysRevLett.76.1114
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Electromigration has a dramatic effect on the morphology of semiconductor surfaces, inducing, for example, step bunching instabilities. To explain these phenomena from a microscopic point of view, we study self-diffusion on Si(lll) through first principles calculations, and propose a mechanism for diffusion bias induced by external electric fields. A competing, wind-force effect arises from enhanced surface electron density, due to incomplete melting. The competition leads to two transitions in surface kinetics with increasing temperature, in agreement with experimental observations.
引用
收藏
页码:1114 / 1117
页数:4
相关论文
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