Metal membranes with hierarchically organized nanotube arrays

被引:69
作者
Lee, W [1 ]
Alexe, M [1 ]
Nielsch, K [1 ]
Gösele, U [1 ]
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle An Der Saale, Germany
关键词
D O I
10.1021/cm050480z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A method for fabricating hierarchically organized arrays of Au nanotubes in the form of membranes, which can be used as shadow masks for generating spatially well-resolved 2-D periodic dot array with a perfect arrangement on a cm2 scale was reported. The electrochemical deposition was used to replicate a master pattern of perfectly ordered AAO membrane based on imprint lithography. It was observed that the fabrication of metal nanotube membranes with different tube diameters can be realized using AAO templates with different channel diameters and/or by varying the electrochemical deposition time. It was shown that the nanofabrication method can be extended to other metallic or even semiconducting materials that can be electrodeposited.
引用
收藏
页码:3325 / 3327
页数:3
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