A spin-polarized scanning electron microscope with 5-nm resolution

被引：18

作者：

Kohashi, T

Koike, K

机构：

[1] JRCAT, ATP, Tsukuba, Ibaraki 3050046, Japan

[2] Hitachi Ltd, Cent Res Lab, Hatoyama, Saitama 3500395, Japan

[3] JRCAT, Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3050046, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2001年 / 40卷 / 11B期

关键词：

SEM; spin polarization; magnetic domains; high spatial resolution; nanostructures; secondary-electron collector;

D O I：

10.1143/JJAP.40.L1264

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

For studying sub-10-nm-scale magnetic structures, a high-resolution spin-polarized scanning electron microscope (spin SEM) was developed. It has a specially designed, compact secondary-electron collector that produces a finer probe beam than that of a conventional spin SEM. By observing a narrow magnetic domain wall of SmCo5, the developed spin SEM was shown to have a high resolution of 5 nm.

引用

页码：L1264 / L1266

页数：3

共 13 条

[1] Comparing the resolution of magnetic force microscopes using the CAMST reference samples [J].

Abelmann, L ;

Porthun, S ;

Haast, M ;

Lodder, C ;

Moser, A ;

Best, ME ;

van Schendel, PJA ;

Stiefel, B ;

Hug, HJ ;

Heydon, GP ;

Farley, A ;

Hoon, SR ;

Pfaffelhuber, T ;

Proksch, R ;

Babcock, K .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1998, 190 (1-2) :135-147

[2] Imaging of magnetic domains by transmission x-ray microscopy [J].

Fischer, P ;

Eimuller, T ;

Schutz, G ;

Guttmann, P ;

Schmahl, G ;

Pruegl, K ;

Bayreuther, G .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (06) :649-655

[3] Real-space imaging of two-dimensional antiferromagnetism on the atomic scale [J].

Heinze, S ;

Bode, M ;

Kubetzka, A ;

Pietzsch, O ;

Nie, X ;

Blügel, S ;

Wiesendanger, R .

SCIENCE, 2000, 288 (5472) :1805-1808

[4]

KOHASHI T, UNPUB

[5] Magnetic block array for patterned magnetic media [J].

Koike, K ;

Matsuyama, H ;

Hirayama, Y ;

Tanahashi, K ;

Kanemura, T ;

Kitakami, O ;

Shimada, Y .

APPLIED PHYSICS LETTERS, 2001, 78 (06) :784-786

[6]

MATSUYAMA H, 1994, J ELECTRON MICROSC, V43, P157

[7] THE MEASUREMENT OF NARROW DOMAIN-WALL WIDTHS IN SMCO5 USING DIFFERENTIAL PHASE-CONTRAST ELECTRON-MICROSCOPY [J].

MORRISON, GR ;

GONG, H ;

CHAPMAN, JN ;

HRNCIAR, V .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) :1338-1342

[8]

OSE Y, 1991, I PHYS C SER, V119, P201

[9] Device physics - Magnetoelectronics [J].

Prinz, GA .

SCIENCE, 1998, 282 (5394) :1660-1663

[10]

SATO M, 1997, HDB CHARGED PARTICLE, P357

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