Electrical properties of zinc oxide sputtered thin films

被引:81
作者
Ondo-Ndong, R [1 ]
Ferblantier, G [1 ]
Pascal-Delannoy, F [1 ]
Boyer, A [1 ]
Foucaran, A [1 ]
机构
[1] Univ Montpellier 2, CNRS, UMR 5507, Ctr Elect & Microoptoelect, F-34095 Montpellier 05, France
关键词
ZnO; conductivity; electrical properties; dielectric properties;
D O I
10.1016/S0026-2692(03)00198-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
ZnO thin films were deposited on silicon substrate by rf magnetron sputtering from metallic zinc target. The electrical properties of ZnO are currently being studied. In this work, measurements of the ac conductivity properties of ZnO sandwich structures with silver and platinum electrodes are reported. The frequency dependence of both the ac conductivity and dielectric constant of thin films of ZnO have been investigated in the frequency range 5 kHz-13 MHz. It is shown that the total ac conductivity sigma(omega), obeys the equation sigma(omega) = Aomega(S) where s is an index which increases with frequency and decreases with temperature. It appears that for ZnO films, the conduction mechanism is thermally activated and both the overlap large polaron tunnelling and the correlated barrier-hopping of charge carrier over localized states fit the experimental data. The dielectric constant, epsilon(r), lies in the range 8-9 at room temperature and is independent of the frequency in the dielectric thin films. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1087 / 1092
页数:6
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