Hydrogen-defect interactions in Si

被引:22
作者
Estreicher, SK [1 ]
Hastings, JL
Fedders, PA
机构
[1] Texas Tech Univ, Dept Phys, Lubbock, TX 79409 USA
[2] Washington Univ, Dept Phys, St Louis, MO 63130 USA
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1999年 / 58卷 / 1-2期
关键词
molecular-dynamics; hydrogen; H-2; H-2*; vacancies; self-interstitials;
D O I
10.1016/S0921-5107(98)00270-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The interactions between hydrogen and intrinsic defects in silicon are studied using ab-initio (tight-binding) molecular-dynamics simulations in supercells and ab-initio Hartree-Fock in clusters. The configurations, electronic structures, and binding energies of H bound to small vacancy aggregates are calculated. The vacancy (V) and the self-interstitial (I)-both rapid diffusers in Si-efficiently dissociate interstitial H, molecules. At low temperatures, this results in the formation of {V, H, H} or {I, H, H} complexes. At high temperatures, one or both H's may be released as interstitials. Preliminary calculations show that H-2* result from the reaction {I, H, H} + V --> H-2*. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:31 / 35
页数:5
相关论文
共 39 条
[11]   HYDROGEN-RELATED DEFECTS IN CRYSTALLINE SEMICONDUCTORS - A THEORISTS PERSPECTIVE [J].
ESTREICHER, SK .
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1995, 14 (7-8) :319-412
[12]   The ring-hexavacany in silicon: A stable and inactive defect [J].
Estreicher, SK ;
Hastings, JL ;
Fedders, PA .
APPLIED PHYSICS LETTERS, 1997, 70 (04) :432-434
[13]   Defect-induced dissociation of H2 in silicon [J].
Estreicher, SK ;
Hastings, JL ;
Fedders, PA .
PHYSICAL REVIEW B, 1998, 57 (20) :R12663-R12665
[14]  
ESTREICHER SK, UNPUB COMPUTATIONAL
[15]  
ESTREICHER SK, UNPUB
[16]   Vacancy aggregates in silicon [J].
Hastings, JL ;
Estreicher, SK ;
Fedders, PA .
PHYSICAL REVIEW B, 1997, 56 (16) :10215-10220
[17]   H-2-ASTERISK DEFECT IN CRYSTALLINE SILICON [J].
HOLBECH, JD ;
NIELSEN, BB ;
JONES, R ;
SITCH, P ;
OBERG, S .
PHYSICAL REVIEW LETTERS, 1993, 71 (06) :875-878
[18]   Hydrogen molecules in silicon located at interstitial sites and trapped in voids [J].
Hourahine, B ;
Jones, R ;
Oberg, S ;
Newman, RC ;
Briddon, PR ;
Roduner, E .
PHYSICAL REVIEW B, 1998, 57 (20) :12666-12669
[19]   Determination of vacancy concentrations in the bulk of silicon wafers by platinum diffusion experiments [J].
Jacob, M ;
Pichler, P ;
Ryssel, H ;
Falster, R .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (01) :182-191
[20]  
Leitch A., 2005, COMMUNICATION