Micromachining for rf communications

[1] High-Q VHF micromechanical contour-mode disk resonators [J]. INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST, 2000, : 493 - 496

[2] Performance of low-loss RF MEMS capacitive switches [J]. IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1998, 8 (08): : 269 - 271

[3] Hyman D, 1999, INT J RF MICROW C E, V9, P348, DOI 10.1002/(SICI)1099-047X(199907)9:4<348::AID-MMCE6>3.0.CO

[4] 2-K

[5] MCGRUER NE, 1998, SOL STAT SENS ACT WO, P132

[6] VHF free-free beam high-Q micromechanical resonators [J]. MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 453 - 458

[7] YAO JJ, 1995, 8 INT C SOL STAT SEN, V2, P384

[8] YOUNG DJ, 1998, SOL STAT SENS ACT WO, P128

[9] YOUNG DJ, 1996, SOL STAT SENS ACT WO, P86

[1] High-Q VHF micromechanical contour-mode disk resonators [J]. INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST, 2000, : 493 - 496

[2] Performance of low-loss RF MEMS capacitive switches [J]. IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1998, 8 (08): : 269 - 271

[3] Hyman D, 1999, INT J RF MICROW C E, V9, P348, DOI 10.1002/(SICI)1099-047X(199907)9:4<348::AID-MMCE6>3.0.CO

[4] 2-K

[5] MCGRUER NE, 1998, SOL STAT SENS ACT WO, P132

[6] VHF free-free beam high-Q micromechanical resonators [J]. MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 453 - 458

[7] YAO JJ, 1995, 8 INT C SOL STAT SEN, V2, P384

[8] YOUNG DJ, 1998, SOL STAT SENS ACT WO, P128

[9] YOUNG DJ, 1996, SOL STAT SENS ACT WO, P86