共 10 条
[1]
MEASUREMENT OF THE ANGULAR-DISTRIBUTION OF SPUTTERED NEUTRALS IN A PLANAR MAGNETRON GEOMETRY
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (02)
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[2]
DIFFUSION LIMITED AGGREGATION - THE ROLE OF SURFACE-DIFFUSION
[J].
PHYSICA A,
1991, 178 (03)
:415-420
[3]
APPLICATIONS OF MONTE-CARLO SIMULATION IN THE ANALYSIS OF A SPUTTER-DEPOSITION PROCESS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (02)
:189-195
[5]
ENERGY SPECTRUM OF EJECTED ATOMS DURING HIGH ENERGY SPUTTERING OF GOLD
[J].
PHILOSOPHICAL MAGAZINE,
1968, 18 (152)
:377-&
[6]
INFLUENCE OF SUBSTRATE TEMPERATURE AND DEPOSITION RATE ON STRUCTURE OF THICK SPUTTERED CU COATINGS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (04)
:830-835
[7]
INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (04)
:666-670