APPLICATIONS OF MONTE-CARLO SIMULATION IN THE ANALYSIS OF A SPUTTER-DEPOSITION PROCESS

被引：101

作者：

MOTOHIRO, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.573469

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：189 / 195

页数：7

共 29 条

[1] BORN-MAYER-TYPE INTERATOMIC POTENTIAL FOR NEUTRAL GROUND-STATE ATOMS WITH Z = 2 TO Z = 105 [J].

ABRAHAMSON, AA .

PHYSICAL REVIEW, 1969, 178 (01) :76-+

[2] ENERGY-DISTRIBUTIONS OF PARTICLES STRIKING THE CATHODE IN A GLOW-DISCHARGE [J].

ABRIL, I ;

GRASMARTI, A ;

VALLESABARCA, JA .

PHYSICAL REVIEW A, 1983, 28 (06) :3677-3678

[3] IMPORTANCE OF ARGON PRESSURE IN THE PREPARATION OF RF-SPUTTERED AMORPHOUS SILICON-HYDROGEN ALLOYS [J].

ANDERSON, DA ;

MODDEL, G ;

PAESLER, MA ;

PAUL, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03) :906-912

[4] SELECTIVE THERMALIZATION IN SPUTTERING TO PRODUCE HIGH TC FILMS [J].

CADIEU, FJ ;

CHENCINSKI, N .

IEEE TRANSACTIONS ON MAGNETICS, 1975, MA11 (02) :227-230

[5] EFFECTS OF ARGON PRESSURE AND SUBSTRATE-TEMPERATURE ON THE STRUCTURE AND PROPERTIES OF SPUTTERED COPPER-FILMS [J].

CRAIG, S ;

HARDING, GL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (02) :205-215

[6]

DUSHMAN S, 1962, SCI F VACUUM TECHNIQ

[7] SOME CALCULATIONS OF THICKNESS DISTRIBUTION OF FILMS DEPOSITED FROM LARGE AREA SPUTTERING SOURCES [J].

GNAEDINGER, RJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (03) :355-+

[8] INFLUENCE OF THE SPUTTERING GAS-PRESSURE ON DEPOSITION PROFILES [J].

GONZALEZDIAZ, G ;

MARTIL, I ;

SANCHEZQUESADA, F ;

RODRIGUEZVIDAL, M ;

GRASMARTI, A ;

VALLESABARCA, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (03) :1394-1397

[9] SLOWING DOWN AND THERMALIZATION OF SPUTTERED PARTICLE FLUXES - ENERGY-DISTRIBUTIONS [J].

GRASMARTI, A ;

VALLESABARCA, JA .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) :1071-1075

[10] THEORIES OF DISTRIBUTION OF DEPOSIT FROM SPUTTERED DISK AND RECTANGULAR ELECTRODES [J].

JONES, RE .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1972, 16 (01) :27-&

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