Effect of CH4 on the electron emission characteristics of active molybdenum field emitter arrays

被引：12

作者：

Chalamala, BR ^{[1
]}

Wallace, RM ^{[1
]}

Gnade, BE ^{[1
]}

机构：

[1] Texas Instruments Inc, Dallas, TX 75245 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.590444

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Exposing active Spindt-type molybdenum field emission microcathode arrays to CH4 resulted in increased electron emission. Exposures of 250 and 2500 L result in electron emission enhancement of 106.2 +/- 41.0% and 200.1 +/- 20.7% and a decrease in tip work function by 10.2 +/- 5.6% and 17.6 +/- 1.7%, respectively. The measured work function changes indicate the formation of molybdenum carbides on the field emitter tips. (C) 1998 American Vacuum Society. [S0734-211X(98)00506-X].

引用

页码：3073 / 3076

页数：4

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