Area-selective microscale metallization on porous anodic oxide film of aluminium

被引：25

作者：

Jha, Himendra ^{[1
]}

Kikuchi, Tatsuya ^{[1
]}

Sakairi, Masatoshi ^{[1
]}

Takahashi, Hideaki ^{[1
]}

机构：

[1] Hokkaido Univ, Grad Sch Engn, Div Mat Sci & Engn, Lab Interface Microstruct Anal, Sapporo, Hokkaido 0608628, Japan

来源：

ELECTROCHEMISTRY COMMUNICATIONS | 2007年 / 9卷 / 07期

关键词：

anodizing; pore-sealing; laser patterning; area-selected deposition; metallic micropatterns;

D O I：

10.1016/j.elecom.2007.03.003

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A new method for micropatterning of metallic patterns on porous anodic oxide film of aluminium is described. The porous anodic oxide film was impregnated with organic dye and palladium ions before the hydrothermal pore-sealing. The surface layers formed during the pore-sealing, i.e. outer acicular hydroxide layer and a compact intermediate sub-layer trap the palladium ion underneath the layers. Exposing the palladium enriched area by the help of laser beam followed by electroless nickel deposition results the deposition of nickel on the laser-exposed part. Thickness of the deposits can be up to about 2-3 mu m, after about the 20 min of immersion in electroless nickel plating bath. The metallic micropatterns, formed by the method are crack free, smooth and uniform over extended length. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：1596 / 1601

页数：6

共 25 条

[1] LASER CHEMICAL VAPOR-DEPOSITION - A TECHNIQUE FOR SELECTIVE AREA DEPOSITION [J].