LIGA technologies and applications

LIGA produces high-aspect-ratio microstructures by using x-ray synchrotron radiation lithography and subsequent electroplating and replication. Over the past decade, processes to expand the materials suite in LIGA have emerged. Hot embossing and injection molding of polymers, as well as ceramic and metal injection molding and cold pressing of nanoparticles, are extending the range of materials that can be used in LIGA. In addition, processing approaches such as sacrificial layers and multilevel techniques are promising to produce more complicated preassembled structures. Commercial application of LIGA-produced polymer and metal parts has occurred in both Germany and the United States. These parts are usually deployed in systems with parts machined by means of other methods. As techniques develop to optimize processing, lower costs, and utilize a broader range of materials, more products can be expected to come onto the market.