Industrial applications of laser micromachining

被引：190

作者：

Gower, MC ^{[1
]}

机构：

[1] Exitech Ltd, Oxford OX8 8LH, England

来源：

OPTICS EXPRESS | 2000年 / 7卷 / 02期

关键词：

D O I：

10.1364/OE.7.000056

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electromechanical system (MEMS) fabrication applications are reviewed. (C)2000 Optical Society of America.

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收藏

页码：56 / 67

页数：12

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