Surface passivation of (100) InP by organic thiols and polyimide as characterized by steady-state photoluminescence

被引:40
作者
Schvartzman, M
Sidorov, V
Ritter, D
Paz, Y [1 ]
机构
[1] Technion Israel Inst Technol, Dept Chem Engn, IL-32000 Haifa, Israel
[2] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
关键词
D O I
10.1088/0268-1242/16/10/103
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A method for the passivation of indium phosphide, based on thiolated organic self-assembled monolayers (SAMs) that form highly ordered, close-packed structures on the semiconductor surface, is presented. It is shown that the intensity of steady-state photoluminescence (PL) of n-type InP wafers covered with the thiolated SAMS increases significantly (as much as 14-fold) upon their covering with the monolayers. The ease with which one can tailor the outer functional groups of the SAMS provides a way to connect this new class of passivators with standard encapsulators, such as polyimide. Indeed, the PL intensity of SAM-coated InP wafers was not altered upon their overcoating with polyimide, despite the high curing temperature of the polymer (200 degreesC).
引用
收藏
页码:L68 / L71
页数:4
相关论文
共 21 条
[1]  
AKMAK C, 1998, PHYS REV B, V57, P8
[2]   Chalcogenide passivation of III-V semiconductor surfaces [J].
Bessolov, VN ;
Lebedev, MV .
SEMICONDUCTORS, 1998, 32 (11) :1141-1156
[3]   Sulphide passivation of GaAs: the role of the sulphur chemical activity [J].
Bessolov, VN ;
Lebedev, MV ;
Binh, NM ;
Friedrich, M ;
Zahn, DRT .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1998, 13 (06) :611-614
[4]   Semiconductor surface reconstruction: The structural chemistry of two-dimensional surface compounds [J].
Duke, CB .
CHEMICAL REVIEWS, 1996, 96 (04) :1237-1259
[5]   DO WE NEED A NEW METHODOLOGY FOR GAAS PASSIVATION [J].
GREEN, AM ;
SPICER, WE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :1061-1069
[6]   Electron tunneling at the semiconductor-insulator-electrolyte interface.: Photocurrent studies of the n-InP-alkanethiol-ferrocyanide system [J].
Gu, Y ;
Waldeck, DH .
JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (45) :9015-9028
[7]   PREPARATION OF SELF-ASSEMBLED MONOLAYERS ON INP [J].
GU, Y ;
LIN, Z ;
BUTERA, RA ;
SMENTKOWSKI, VS ;
WALDECK, DH .
LANGMUIR, 1995, 11 (06) :1849-1851
[8]   PASSIVATION OF GAAS-SURFACES AND ALGAAS/GAAS HETEROJUNCTION BIPOLAR-TRANSISTORS USING SULFIDE SOLUTIONS AND SINX OVERLAYER [J].
KAPILA, A ;
MALHOTRA, V ;
CAMNITZ, LH ;
SEAWARD, KL ;
MARS, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (01) :10-14
[9]  
LEWIS LJ, 1909, MATER RES SOC S P, V573, P3
[10]   CHEMICAL STUDIES OF THE PASSIVATION OF GAAS SURFACE RECOMBINATION USING SULFIDES AND THIOLS [J].
LUNT, SR ;
RYBA, GN ;
SANTANGELO, PG ;
LEWIS, NS .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (12) :7449-7465