Effect of collisionless heating on electron energy distribution in an inductively coupled plasma

被引：125

作者：

Godyak, VA

Kolobov, VI

机构：

[1] OSRAM SYLVANIA Dev Inc, Beverly, MA 01915 USA

[2] CFD Res Corp, Huntsville, AL 35805 USA

来源：

PHYSICAL REVIEW LETTERS | 1998年 / 81卷 / 02期

关键词：

D O I：

10.1103/PhysRevLett.81.369

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Significant frequency dependence of the electron energy distribution has been found in a low-pressure inductive discharge experiment. The observed frequency dependence reveals The presence of collisionless electron heating and appears as a result of finite electron-transit time through the skin layer. The energy distributions;calculated from a kinetic equation accounting for nonlocality of electron kinetics and electrodynamics are in good agreement with the experiment.

引用

收藏

页码：369 / 372

页数：4

相关论文

共 19 条

[1]

ALANAKYAN YR, 1979, SOV J PLASMA PHYS, V5, P504

[2] Quasilinear theory of collisionless electron heating in radio frequency gas discharges [J].

Aliev, YM ;

Kaganovich, ID ;

Schluter, H .

PHYSICS OF PLASMAS, 1997, 4 (07) :2413-2421

[3] THE EFFICIENCY OF THE ELECTRON SHEATH HEATING IN CAPACITIVELY COUPLED RADIO-FREQUENCY DISCHARGES IN THE WEAKLY COLLISIONAL REGIME [J].

BUDDEMEIER, U ;

KORTSHAGEN, U ;

PUKROPSKI, I .

APPLIED PHYSICS LETTERS, 1995, 67 (02) :191-193

[4] Electron kinetics in radio-frequency magnetic fields of inductive plasma sources [J].

Cohen, RH ;

Rognlien, TD .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (03) :442-452

[5]

Fried B. D., 1961, PLASMA DISPERSION FU

[6] Measurements of electron energy distribution in low-pressure RF discharges [J].

Godyak, V. A. ;

Piejak, R. B. ;

Alexandrovich, B. M. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) :36-58

[7] Electromagnetic field structure in a weakly collisional inductively coupled plasma [J].

Godyak, VA ;

Piejak, RB .

JOURNAL OF APPLIED PHYSICS, 1997, 82 (12) :5944-5947

[8] Negative power absorption in inductively coupled plasma [J].

Godyak, VA ;

Kolobov, VI .

PHYSICAL REVIEW LETTERS, 1997, 79 (23) :4589-4592

[9] Experimental evidence of collisionless power absorption in inductively coupled plasmas [J].

Godyak, VA ;

Piejak, RB ;

Alexandrovich, BM ;

Kolobov, VI .

PHYSICAL REVIEW LETTERS, 1998, 80 (15) :3264-3267

[10] ABNORMALLY LOW ELECTRON-ENERGY AND HEATING-MODE TRANSITION IN A LOW-PRESSURE ARGON RF DISCHARGE AT 13.56 MHZ [J].

GODYAK, VA ;

PIEJAK, RB .

PHYSICAL REVIEW LETTERS, 1990, 65 (08) :996-999