Gold promoted Li-Fe2O3 thin films for humidity sensors

被引：30

作者：

Neri, G ^{[1
]}

Bonavita, A ^{[1
]}

Milone, C ^{[1
]}

Pistone, A ^{[1
]}

Galvagno, S ^{[1
]}

机构：

[1] Univ Messina, Dept Ind Chem & Mat Engn, I-98166 Messina, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 92卷 / 03期

关键词：

liquid phase deposition; humidity sensors; gold-promoted thin films;

D O I：

10.1016/S0925-4005(03)00272-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A study of iron oxide thin films doped with Li and Au for humidity sensing applications is reported. The characteristics of sensitivity, linearity and stability of humidity sensors based on these films were investigated and correlated to the structural and textural properties of the sensing layer. Such properties are influenced by the nature of the dopant and the thermal treatment. Li creates preferential adsorption sites for the H2O molecules thus increasing the sensitivity at low RH. Gold instead reduces the drift of the resistance baseline stabilizing the presence of amorphous iron oxide phases. By optimizing the thermal treatment of Au-doped Li-Fe2O3 thin films, humidity sensors with high sensitivity, linearity and good stability have been developed. (C) 2003 Elsevier Science B.V All rights reserved.

引用

页码：326 / 330

页数：5

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