Optoelectronic multichip module integration for chip level optical interconnects

被引：14

作者：

Prather, DW ^{[1
]}

Venkataraman, S

Lecompte, M

Kiamilev, F

Mait, JN

Simonis, GJ

机构：

[1] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA

[2] USA, Res Lab, Adelphi, MD 20783 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2001年 / 13卷 / 10期

关键词：

diffractive optics; flip-chip bonding; multichip module; optical interconnects; vertical-cavity surface-emitting lasers;

D O I：

10.1109/68.950752

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have integrated an 850-nm vertical-cavity surface-emitting laser (VCSEL), its driver, and a diffractive lenslet array onto a single substrate to produce an integrated optoelectronic multichip module for signal fan-out and distribution. The diffractive element performs optical fan-out of the output beam from the VCSEL into an array of focused spots at a plane 1,416 mum from the surface of the VCSEL. This corresponds to 160 mum from the surface of the diffractive lens. System design, fabrication, integration, and experimental characterization is presented.

引用

页码：1112 / 1114

页数：3

共 8 条

[1] Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays [J].

Eitel, S ;

Fancey, SJ ;

Gauggel, HP ;

Gulden, KH ;

Bächtold, W ;

Taghizadeh, MR .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (05) :459-461

[2] Performance scaling comparison for free-space optical and electrical interconnection approaches [J].

Haney, MW ;

Christensen, MP .

APPLIED OPTICS, 1998, 37 (14) :2886-2894

[3] A 500Mb/s, 32-channel CMOS VCSEL driver with built-in self-test and clock generation circuitry [J].

Kiamilev, FE ;

Krishnamoorthy, AV .

OPTOELETRONIC INTEGRATED CIRCUITS AND PACKAGING III, 1999, 3631 :18-26

[4] Three dimensional through-wafer fan-out optical interconnects [J].

LeCompte, M ;

Gao, X ;

Bates, H ;

Meckel, J ;

Shi, SY ;

Prather, DW .

OPTOELECTRONIC INTERCONNECTS VII; PHOTONICS PACKAGING AND INTEGRATION II, 2000, 3952 :318-328

[5] Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping [J].

Martinsson, H ;

Bengtsson, J ;

Ghisoni, M ;

Larsson, A .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (05) :503-505

[6] Vector-based synthesis of finite aperiodic subwavelength diffractive optical elements [J].

Prather, DW ;

Mait, JN ;

Mirotznik, MS ;

Collins, JP .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1998, 15 (06) :1599-1607

[7]

PRATHER DW, 2001, P SPIE

[8]

Sze SM, 1988, VLSI TECHNOLOGY

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