A model describing the energy distribution of ions bombarding electrodes in an RF-plasma reactor

A model has been presented for the ion bombardment energy distribution at both electrodes of a planar RF plasma reactor. Charge-exchange collision in the sheath is assumed to be the mechanism which limits the fast ions and generates the energetic neutrals. Using the electrical and geometric parameters of the reactor, the model predicts the relative ion and fast neutral bombardment energy distributions. The results were compared with experimental values.