BIAS EFFECTS ON PREPARATION OF AMORPHOUS-SILICON IN A TRIODE GLOW-DISCHARGE

被引：3

作者：

AOZASA, M

PYON, RG

ANDO, K

机构：

[1] Osaka City Univ, Osaka, Jpn, Osaka City Univ, Osaka, Jpn

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90285-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：263 / 274

页数：12

共 26 条

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