BIAS EFFECTS ON THE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FILM IN A GLOW-DISCHARGE

被引：20

作者：

ANDO, K

AOZASA, M

PYON, RG

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 04期

关键词：

D O I：

10.1063/1.94793

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：413 / 415

页数：3

共 11 条

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[8] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS [J].

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[9] NOVEL EFFECTS OF MAGNETIC-FIELD ON THE SILANE GLOW-DISCHARGE [J].

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[10] EFFECT OF ANNEALING ON THE OPTICAL-PROPERTIES OF PLASMA DEPOSITED AMORPHOUS HYDROGENATED SILICON [J].

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