Photoluminescent properties of ZnO thin films grown on SiO2/Si(100) by metal-organic chemical vapor deposition

被引：58

作者：

Park, WI ^{[1
]}

Yi, GC ^{[1
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang 790784, South Korea

来源：

JOURNAL OF ELECTRONIC MATERIALS | 2001年 / 30卷 / 10期

关键词：

ZnO; metal organic chemical vapor deposition (MOCVD); photoluminescence; SiO2/Si substrate; stimulated emission;

D O I：

10.1007/s11664-001-0127-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the photoluminescent (PL) properties of ZnO thin films grown on SiO2/Si(100) substrates using low pressure metal-organic chemical vapor deposition. The growth temperature of the films was as low as 400 degreesC. From the PL spectra of the films at 10-300 K, strong PL peaks due to fi-ee and bound excitons were observed. The origin of the near bandedge emission peaks was investigated measuring temperature-dependent PL spectra. In addition, the ZnO films demonstrated a stimulated emission peak at room temperature. Upon illumination with an excitation density of 1 MW/cm(2), a strong, sharp peak was observed at 3.181 eV.

引用

页码：L32 / L35

页数：4

共 12 条

[1] Room temperature excitonic stimulated emission from zinc oxide epilayers grown by plasma-assisted MBE
Bagnall, DM
Chen, YF
Shen, MY
Zhu, Z
Goto, T
Yao, T
[J]. JOURNAL OF CRYSTAL GROWTH, 1998, 184 : 605 - 609
[2] LUMINESCENCE OF HETEROEPITAXIAL ZINC-OXIDE
BETHKE, S
PAN, H
WESSELS, BW
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (02) : 138 - 140
[3] ZnO as a novel photonic material for the UV region
Chen, YF
Bagnall, D
Yao, TF
[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 75 (2-3): : 190 - 198
[4] Growth of high-quality epitaxial ZnO films on α-Al2O3
Fons, P
Iwata, K
Niki, S
Yamada, A
Matsubara, K
[J]. JOURNAL OF CRYSTAL GROWTH, 1999, 201 : 627 - 632
[5] Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (01(1)over-bar2) sapphire by metalorganic chemical vapor deposition
Gorla, CR
Emanetoglu, NW
Liang, S
Mayo, WE
Lu, Y
Wraback, M
Shen, H
[J]. JOURNAL OF APPLIED PHYSICS, 1999, 85 (05) : 2595 - 2602
[6] Multicolored light emitters on silicon substrates
Guha, S
Bojarczuk, NA
[J]. APPLIED PHYSICS LETTERS, 1998, 73 (11) : 1487 - 1489
[7] LUMINESCENCE OF ZNO UNDER HIGH ONE-QUANTUM AND 2-QUANTUM EXCITATION
KLINGSHIRN, C
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1975, 71 (02): : 547 - 556
[8] Room-temperature luminescence of excitons in ZnO/(Mg, Zn)O multiple quantum wells on lattice-matched substrates
Makino, T
Chia, CH
Tuan, NT
Sun, HD
Segawa, Y
Kawasaki, M
Ohtomo, A
Tamura, K
Koinuma, H
[J]. APPLIED PHYSICS LETTERS, 2000, 77 (07) : 975 - 977
[9] Metal-organic vapor phase epitaxial growth of high-quality ZnO films on Al2O3(00.1)
Park, WI
An, SJ
Yi, GC
Jang, HM
[J]. JOURNAL OF MATERIALS RESEARCH, 2001, 16 (05) : 1358 - 1362
[10] Materials science - Will UV lasers beat the blues?
Service, RE
[J]. SCIENCE, 1997, 276 (5314) : 895 - 895

← 1 2 →