Microfabrication of nanoscale cluster chains on a patterned Si surface

被引:22
作者
Liu, J [1 ]
Barnard, JC [1 ]
Seeger, K [1 ]
Palmer, RE [1 ]
机构
[1] Univ Birmingham, Sch Phys & Astron, Nanoscale Phys Res Lab, Birmingham B15 2TT, W Midlands, England
关键词
D O I
10.1063/1.122358
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the formation of Cu clusters from Cu atoms deposited onto a Si (111) surface patterned with (2-5 mu m width) lines of photoresist. In addition to a thin Cu layer on the exposed Si surface, large (similar to 150 nm) clusters nucleate at the boundary between the Si and the resist strips, which remain after removal of the resist by dissolution. The results show how it is possible, using the resist to collect deposited atoms, to assemble nanoscale cluster structures with a precision (similar to 150 nm feature size) which is much better than the resolution of conventional optical lithography (similar to mu m linewidth). (C) 1998 American Institute of Physics. [S0003-6951(98)02940-4].
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页码:2030 / 2032
页数:3
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