Application of amorphous oxide TFT to electrophoretic display

被引:74
作者
Ito, M. [1 ]
Miyazaki, C. [1 ]
Ishizaki, M. [1 ]
Kon, M. [1 ]
Ikeda, N. [1 ]
Okubo, T. [1 ]
Matsubara, R. [1 ]
Hatta, K. [1 ]
Ugajin, Y. [1 ]
Sekine, N. [1 ]
机构
[1] Toppan Printing Co Ltd, Tech Res Inst, Saitama 3458508, Japan
关键词
thin film transistors;
D O I
10.1016/j.jnoncrysol.2007.10.083
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Application of amorphous oxide thin film transistor (TFT) to electronic paper is demonstrated. We have fabricated a 4-in. bottom gate amorphous In-Ga-Zn-O (a-IGZO) TFT array and combined it with an electrophoretic frontplane. The resolution of the display is 200 ppi and the number of the pixel is 640 x 480 (QVGA). As far as we know, this is the largest pixel count display which has been driven by oxide based TFTs. Moreover, we propose a low-cost fabrication process for oxide based TFT. A printing process was employed to form the source and drain electrodes. The source and electrodes were printed by a standard screen-printing method. A fine pattern for the source and drain electrodes with a channel length of 40 gm was successfully printed onto the a-IGZO semiconductor layer. Our a-IGZO TFT with printed source and drain electrodes shows high on/off ratio of more than seven orders of magnitude and field effect mobility of 2.8 cm(2)/V s. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:2777 / 2782
页数:6
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