A monolithic PDMS waveguide system fabricated using soft-lithography techniques

被引:186
作者
Chang-Yen, DA [1 ]
Eich, RK [1 ]
Gale, BK [1 ]
机构
[1] Univ Utah, Dept Mech Engn, Salt Lake City, UT 84112 USA
关键词
micro-total-analysis systems; poly(dimethylsiloxane); soft lithography; waveguide;
D O I
10.1109/JLT.2005.849932
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A monolithic waveguide system using poly(dimethyl siloxane) (PDMS) was designed, fabricated, and characterized. The waveguide demonstrated good confinement of light and relatively low attenuation at 0.40 dB/cm. The robustness and handling properties of the completed waveguides were excellent, and the process yield exceeded 96%. The waveguide did exhibit moderate temperature and humidity sensitivity but no temporal variation, and insertion loss remained stable over extended periods of time. Applications of this waveguide system in microscale sensing are immense, judging by the frequency of use of PDMS as the substrate for microfluidic and biomedical systems. The monolithic nature of the waveguides also reduces their cost and allows integration of optical pathways into existing PDMS-based microsystems.
引用
收藏
页码:2088 / 2093
页数:6
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