Spectroscopic study of chemical phase separation in zirconium silicate alloys

被引：65

作者：

Rayner, GB ^{[1
]}

Kang, D ^{[1
]}

Lucovsky, G ^{[1
]}

机构：

[1] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 04期

关键词：

D O I：

10.1116/1.1593646

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article presents a comprehensive spectroscopic study of chemical phase separation in zirconium silicate alloys, (ZrO2)(x)(SiO2)(1-x), using Fourier transform infrared spectroscopy, x-ray photoelectron spectroscopy, extended x-ray absorption fine structure spectroscopy, and near edge x-ray absorption spectroscopy. These measurements are complemented by measurements of x-ray diffraction and high resolution transmission electronic microscopy imaging. This combination has been applied to Zr silicate alloys, providing the first comprehensive comparisons of the relative sensitivities of these spectroscopic techniques applied to micro- and nanoscale chemical phase separation of high-k dielectric alloys. (C) 2003 American Vacuum Society.

引用

页码：1783 / 1791

页数：9

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