High-speed optical microscanner driven with resonation of lam waves using Pb(Zr,Ti)O3 thick films formed by aerosol deposition

被引：46

作者：

Akedo, J ^{[1
]}

Lebedev, M ^{[1
]}

Sato, H ^{[1
]}

Park, J ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 9B期

关键词：

aerosol deposition; optical scanner; PZT; actuator; MEMS; thick film;

D O I：

10.1143/JJAP.44.7072

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A high-performance optical microscanner with a resonance frequency over 20 kHz and a scan angle (peak-to-peak value) over 30 degrees in atmospheric ambient, was successfully fabricated by deposit piezoelectric materials at a high rate by the AD method onto a metal scanner structure, which was fabricated by mechanical machining. The scanner is applicable to SVGA high resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.

引用

页码：7072 / 7077

页数：6

共 18 条

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