Effects of annealing and poling conditions on piezoelectric properties of Pb(Zr0.52,Ti0.48)O3 thick films formed by aerosol deposition method

被引：52

作者：

Akedo, J

Lebedev, M

机构：

[1] AIST, Natl Inst Adv Ind Sci & Technol, Adv Proc Mech Grp, Tsukuba, Ibaraki 3058564, Japan

[2] AIST, Natl Inst Adv Ind Sci & Technol, Digital Mfg Res Ctr, Tsukuba, Ibaraki 3058564, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 2002年 / 235卷 / 1-4期

关键词：

nanostructures; solidification; polycrystalline deposition; perovskites; ferroelectric materials; piezoelectric materials;

D O I：

10.1016/S0022-0248(01)01925-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Lead zirconate titanate (PZT) thick films were formed on several kinds of substrates by impact consolidation of PZT ultrafine particles through an aerosol deposition method. The PZT layers were shown to have a high breakdown voltage of about 700 kV/cm after annealing at temperatures from room temperature to 1000degreesC. After annealing at 600-1000degreesC for I h in air and poling at 250degreesC 40 kV/cm for 30 min, the layers had good piezoelectric properties: -d(31) similar to 100 pm/V, which did not change with fatigue testing up to 109 cycles. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：415 / 420

页数：6

共 22 条

[1] Piezoelectric properties and poling effect of Pb(Zr, Ti)O3 thick films prepared for microactuators by aerosol deposition [J].