Deposition and properties of tetrahedral amorphous carbon films prepared on magnetic hard disks

被引:15
作者
Chan, CY [1 ]
Lai, KH
Fung, MK
Wong, WK
Bello, I
Huang, RF
Lee, CS
Lee, ST
Wong, SP
机构
[1] City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, Hong Kong, Hong Kong, Peoples R China
[2] Chinese Univ Hong Kong, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2001年 / 19卷 / 04期
关键词
D O I
10.1116/1.1355365
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The areal density of information stored on the hard disk has doubled every two years. This substantial increase in disk storage has resulted from the application of giant magnetoresistance heads, new thin film media, and better electronic recording channels. However, such an increase cannot be easily attained without reducing the separation between the magnetic read-write head and magnetic recording medium surfaces. This can be achieved by using a thinner protective overcoat. In this study, ultrathin tetrahedral amorphous carbon (ta-C) films were deposited on magnetic hard disks (CoCrTa/Cr/NiP/Al-Mg) by a magnetic filtered cathodic arc deposition under different substrate bias voltages. The obtained films exhibited smoother surfaces than the uncoated disks as indicated by the atomic force microscopic measurement. The Raman spectra acquired showed a single asymmetric Lorentzian curve shape. Tetrahedral amorphous carbon coatings were subjected to an accelerated corrosion test in vapors of concentrated hydrochloric acid for 24 h. The corrosion test demonstrated a reduced density of corrosion sites when compared to conventional diamond-like carbon films. Similarly, the scratch resistance of the ta-C coated disks, investigated by a nanoindenter, showed significant improvement in comparison to uncoated disks. (C) 2001 American Vacuum Society.
引用
收藏
页码:1606 / 1610
页数:5
相关论文
共 19 条
[1]   EFFECT OF VACUUM ARE DEPOSITION PARAMETERS ON THE PROPERTIES OF AMORPHOUS-CARBON THIN-FILMS [J].
ANDERS, S ;
ANDERS, A ;
BROWN, IG ;
WEI, B ;
KOMVOPOULOS, K ;
AGER, JW ;
YU, KM .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :388-393
[2]   Effects of substrate cooling in hard magnetic disk sputtering process on protective overcoat and magnetic layer properties [J].
Anoikin, EV ;
Yang, MM ;
Sullivan, MT ;
Chao, JL ;
Ager, JW .
ACTA MATERIALIA, 1998, 46 (11) :3787-3791
[3]   Nanoscale scratch resistance of ultrathin protective overcoats on hard magnetic disks [J].
Anoikin, EV ;
Yang, MM ;
Chao, JL ;
Elings, JR ;
Brown, DW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03) :1741-1744
[4]  
ASHAR KG, 1997, MAGNETIC DISK DRIVE, P163
[5]   Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments [J].
Bhushan, B .
DIAMOND AND RELATED MATERIALS, 1999, 8 (11) :1985-2015
[6]   Nanoindentation and nanoscratching studies of amorphous carbon films [J].
Charitidis, C ;
Logothetidis, S ;
Douka, P .
DIAMOND AND RELATED MATERIALS, 1999, 8 (2-5) :558-562
[7]   Highly tetrahedral amorphous carbon films with low stress [J].
Chhowalla, M ;
Yin, Y ;
Amaratunga, GAJ ;
McKenzie, DR ;
Frauenheim, T .
APPLIED PHYSICS LETTERS, 1996, 69 (16) :2344-2346
[8]   Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy [J].
Gilkes, KWR ;
Prawer, S ;
Nugent, KW ;
Robertson, J ;
Sands, HS ;
Lifshitz, Y ;
Shi, X .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (10) :7283-7289
[9]   Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films [J].
Hakovirta, M ;
Tiainen, VM ;
Pekko, P .
DIAMOND AND RELATED MATERIALS, 1999, 8 (07) :1183-1192
[10]   Thermal stability and relaxation in diamond-like-carbon.: A Raman study of films with different sp3 fractions (ta-C to a-C) [J].
Kalish, R ;
Lifshitz, Y ;
Nugent, K ;
Prawer, S .
APPLIED PHYSICS LETTERS, 1999, 74 (20) :2936-2938