Performances presented by zinc oxide thin films deposited by spray pyrolysis

被引：179

作者：

Nunes, P

Fernandes, B

Fortunato, E

Vilarinho, P

Martins, R

机构：

[1] Univ Nova Lisboa, Fac Ciencias & Tecnol, CENIMAT, Dept Mat Sci, P-2825 Monte De Caparica, Portugal

[2] Univ Aveiro, Ceram & Glass Dept, P-3810 Aveiro, Portugal

来源：

THIN SOLID FILMS | 1999年 / 337卷 / 1-2期

关键词：

coatings; deposition process; zinc oxide; electrical properties; optical properties; X-ray diffraction;

D O I：

10.1016/S0040-6090(98)01394-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of doping and annealing atmosphere on the performances of zinc oxide thin films prepared by spray pyrolysis have been studied. The results show that the way doping influences the electrical and structural properties depends also on the characteristics of the doping element. Annealing the as-deposited films in an inert atmosphere leads to a substantial reduction in the: resistivity of the films deposited and to an increase on the degree of film's crystallinity. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：176 / 179

页数：4

共 14 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF BIAS SPUTTERED ZNO THIN-FILMS [J].