CHARACTERISTICS OF INDIUM TIN OXIDE-FILMS DEPOSITED BY RF MAGNETRON SPUTTERING

被引：88

作者：

JOSHI, RN ^{[1
]}

SINGH, VP ^{[1
]}

MCCLURE, JC ^{[1
]}

机构：

[1] UNIV TEXAS,DEPT ELECT & COMP ENGN,DEPT MAT & MET ENGN,EL PASO,TX 79968

来源：

THIN SOLID FILMS | 1995年 / 257卷 / 01期

关键词：

INDIUM OXIDE; RESISTIVITY; SPUTTERING; TIN OXIDE;

D O I：

10.1016/0040-6090(94)06331-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly conductive indium tin oxide (ITO) films were deposited by r.f. magnetron sputtering using ITO targets. The composition of the ITO targets was 90% indium oxide and 10% tin oxide. ITO films were deposited on 1 mm thick soda lime glass. Films deposited at substrate temperature of 300 degrees C, exhibited resistivities as low as 1.3 x 10(-4) ohm cm(-1). Annealing of the ITO films in air for 2 h was necessary for achieving low resistivities. X-ray diffraction and transmissivity tests were carried out to study the effects of annealing. Lowest resistivity and highest transmission were found to occur at an annealing temperature of 350 degrees C. X-ray diffraction measurements revealed that the as deposited film had a strongly (222) oriented cubic structure. Annealing relieved the as deposited tensile strain and increased crystal perfection.

引用

页码：32 / 35

页数：4

共 10 条

[1]

BUBE RH, 1989, IEEE T ELECTRON DEV, V31, P528

[2] INFLUENCE OF MANUFACTURING PROCESS OF INDIUM TIN OXIDE SPUTTERING TARGETS ON SPUTTERING BEHAVIOR [J].

GEHMAN, BL ;

JONSSON, S ;

RUDOLPH, T ;

SCHERER, M ;

WEIGERT, M ;

WERNER, R .

THIN SOLID FILMS, 1992, 220 (1-2) :333-336

[3] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

THIN SOLID FILMS, 1975, 29 (01) :155-163

[4] INDIUM-TIN OXIDE DEPOSITION BY DC REACTIVE SPUTTERING ON A LOW SOFTENING POINT MATERIAL [J].

KAWADA, A .

THIN SOLID FILMS, 1990, 191 (02) :297-303

[5] ELECTRICAL, OPTICAL AND CHEMICAL-PROPERTIES OF INDIUM TIN OXIDIZED FILMS GROWN BY SEQUENTIAL ELECTRON-BEAM DEPOSITION OF INDIUM AND TIN [J].

KULKARNI, AK ;

KNICKERBOCKER, SA .

THIN SOLID FILMS, 1992, 220 (1-2) :321-326

[6] HIGH CONDUCTING LARGE AREA INDIUM TIN OXIDE ELECTRODES FOR DISPLAYS PREPARED BY DC MAGNETRON SPUTTERING [J].

LATZ, R ;

MICHAEL, K ;

SCHERER, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (2A) :L149-L151

[7] PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS [J].

LEHMANN, HW ;

WIDMER, R .

THIN SOLID FILMS, 1975, 27 (02) :359-368

[8] DEPOSITION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF INDIUM TIN OXIDE BY REACTIVE ION PLATING [J].

MACHET, J ;

GUILLE, J ;

SAULNIER, P ;

ROBERT, S .

THIN SOLID FILMS, 1981, 80 (1-3) :149-155

[9]

SINGH VP, 1988, IEEE T ELECTRON DEV, V35, P38, DOI 10.1109/16.2413

[10] INDIUM TIN OXIDE-FILMS BY SEQUENTIAL EVAPORATION [J].

YAO, JL ;

HAO, S ;

WILKINSON, JS .

THIN SOLID FILMS, 1990, 189 (02) :227-233

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