Measurement of absolute CH3 concentration in a hot-filament reactor using cavity ring-down spectroscopy

被引:47
作者
Wahl, EH [1 ]
Owano, TG [1 ]
Kruger, CH [1 ]
Zalicki, P [1 ]
Ma, Y [1 ]
Zare, RN [1 ]
机构
[1] STANFORD UNIV,DEPT CHEM,STANFORD,CA 94305
关键词
CVD; diamond; methyl radical; UV absorption spectroscopy;
D O I
10.1016/0925-9635(95)00359-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Methyl radicals were generated in a hot-filament diamond synthesis reactor using a resistively heated tungsten filament (length, 20 mm) in a slowly flowing mixture of 0.5% CH4 in H-2. The UV absorbance of CH3 was measured during deposition using a new line-of-sight optical technique called cavity ring-down spectroscopy (CRDS). Measurements were carried out at 213.9 mm, a wavelength at which the CH3 absorption cross-section has been shown by others to be independent of the temperature over a large range. We observed that the CH3 absolute concentration varied strongly as a function of the position between the substrate and the filament, and its value was strongly influenced by the substrate temperature.
引用
收藏
页码:373 / 377
页数:5
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