Secondary ion coincidence in highly charged ion based secondary ion mass spectroscopy for process characterization

被引：14

作者：

Hamza, AV ^{[1
]}

Schenkel, T ^{[1
]}

Barnes, AV ^{[1
]}

Schneider, DH ^{[1
]}

机构：

[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94551 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 01期

关键词：

COINCIDENCE METHODS; DEPOSITION; MASS SPECTROSCOPY; MULTICHARGED IONS; SECONDARY EMISSION; SILICON; SILICON OXIDES; TIME-OF-FLIGHT MASS SPECTROMETERS; TUNGSTEN;

D O I：

10.1116/1.582026

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Coincidence counting in highly charged ion based secondary ion mass spectroscopy has been applied to the characterization of selective tungsten deposition via disilane reduction of tungsten hexafluoride on a patterned SiO2/Si wafer. The high secondary ion yield and the secondary ion emission from a small area produced by highly charged ions make the coincidence technique very powerful. [S0734-2101(99)03601-5].

引用

页码：303 / 305

页数：3

共 9 条

[1]

OHBA T, 1989, TUNGSTEN OTHER REFRA, V4, P17

[2] COINCIDENCE COUNTING IN TIME-OF-FLIGHT MASS-SPECTROMETRY - A TEST FOR CHEMICAL MICROHOMOGENEITY [J].

PARK, MA ;

GIBSON, KA ;

QUINONES, L ;

SCHWEIKERT, EA .

SCIENCE, 1990, 248 (4958) :988-990

[3]

RIGGI F, 1993, NUCL INSTRUM METH B, V79, P230

[4]

RUHLICKE C, 1995, NUCL INSTRUM METH B, V99, P528

[5] Cluster ion emission in the interaction of slow highly charged ions with surfaces [J].

Schenkel, T ;

Barnes, AV ;

Hamza, AV ;

Schneider, DH .

EUROPEAN PHYSICAL JOURNAL D, 1998, 1 (03) :297-302

[6] Emission of secondary particles from metals and insulators at impact of slow highly charged ions [J].

Schenkel, T ;

Barnes, AV ;

Briere, MA ;

Hamza, A ;

vonWittenau, AS ;

Schneider, DH .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 125 (1-4) :153-158

[7] Synergy of electronic excitations and elastic collision spikes in sputtering of heavy metal oxides [J].

Schenkel, T ;

Barnes, AV ;

Hamza, AV ;

Schneider, DH ;

Banks, JC ;

Doyle, BL .

PHYSICAL REVIEW LETTERS, 1998, 80 (19) :4325-4328

[8] PRODUCTION OF HIGH-CHARGE-STATE THORIUM AND URANIUM IONS IN AN ELECTRON-BEAM ION TRAP [J].

SCHNEIDER, D ;

CLARK, MW ;

PENETRANTE, BM ;

MCDONALD, J ;

DEWITT, D ;

BARDSLEY, JN .

PHYSICAL REVIEW A, 1991, 44 (05) :3119-3124

[9]

SCHNEIDER D, 1996, PHYS SCRIPTA, V35, P228

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