High-frequency micromechanical resonators from aluminium-carbon nanotube nanolaminates

被引:43
作者
Bak, Jung Hoon [1 ]
Kim, Young Duck [1 ]
Hong, Seung Sae [1 ]
Lee, Byung Yang [1 ]
Lee, Seung Ran [1 ]
Jang, Jae Hyuck [2 ]
Kim, Miyoung [2 ]
Char, Kookrin [1 ]
Hong, Seunghun [1 ]
Park, Yun Daniel [1 ]
机构
[1] Seoul Natl Univ, Dept Phys & Astron, Seoul 151747, South Korea
[2] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151744, South Korea
关键词
D O I
10.1038/nmat2181
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
At micro- and nanoscales, materials with high Young's moduli and low densities are of great interest for high-frequency micromechanical resonator devices(1-8). Incorporating carbon nanotubes (CNTs), with their unmatched properties, has added functionality to many man-made composites(9-11). We report on the fabrication of <= 100-nm-thick laminates by sputter-deposition of aluminium onto a two-dimensional single-walled CNT network(12,13). These nanolaminates - composed of Al, its native oxide Al2O3 and CNTs - are fashioned, in a scalable manner, into suspended doubly clamped micromechanical beams. Dynamic flexural measurements show marked increases in resonant frequencies for nanolaminates with Al - CNT laminae. Such increases, further supported by quasi- static flexural measurements, are partly attributable to enhancements in elastic properties arising from the addition of CNTs. As a consequence, these nanolaminate micromechanical resonators show significant suppression of mechanical nonlinearity and enhanced strength, both of which are advantageous for practical applications and analogous to biological nanocomposites, similarly composed of high-aspect-ratio, mechanically superior mineral platelets in a soft protein matrix(14).
引用
收藏
页码:459 / 463
页数:5
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