The effect of Pb stiochiometry on switching behavior of Pt/lead zirconate titanate/Pt ferroelectric capacitors

被引:6
作者
Norga, GJ
Maes, J
Coppye, E
Fè, L
Wouters, D
Van der Biest, O
机构
[1] Interuniv Microelect Ctr, B-3001 Louvain, Belgium
[2] Katholieke Univ Leuven, Dept Met & Mat Engn, B-3001 Louvain, Belgium
关键词
D O I
10.1557/JMR.2000.0332
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A promising approach to control Pb stoichiometry during crystallization of sol-gel-derived lead zirconate titanate (PZT) layers is presented. Pyrolyzed layers were encapsulated in a quartz ampoule containing PbZrO3 powder and crystallized in a lamp furnace, For moderate heating rates, the PbO ambient created by the powder resulted in a pronounced sharpening of the preferential (111) texture, while the remanent polarisation P-r increased by 50% compared to nonencapsulated samples. A significant reduction of the coercive field was seen for layers crystallized under PbO ambient, reflected in a lowering of the switching voltage by 0.5 V compared to standard hotplate crystallized films. The results highlighted the key role of Pb stoichiometry control for further lowering the switching voltage of PZT films.
引用
收藏
页码:2309 / 2313
页数:5
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