Detection and depth profiling of 19F using a resonance at 2313 keV in the 19F(α,p)22Ne nuclear reaction

被引：3

作者：

Borgardt, JD

Ashbaugh, MD

McIntyre, LC

Stoner, JO

Gregory, RB

Azrak, M

Wetzel, J

机构：

[1] Univ Arizona, Dept Phys, Tucson, AZ 85721 USA

[2] Motorola Inc, Mat Res & Strateg Technol, Mesa, AZ 85202 USA

[3] Motorola Inc, Mat Res & Strateg Technol, Austin, TX 78721 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 136卷

关键词：

D O I：

10.1016/S0168-583X(97)00737-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Cross section measurements are reported for the p(0) and p(1) proton groups from the (19)F(alpha, p)(22)Ne nuclear reaction in the energy range 2150-2520 keV at a reaction angle of 135 degrees, A narrow resonance at 2313 keV incident energy is shown to be useful in detecting and depth profiling (19)F in thin films. Computer simulation is used to find F concentration profiles which are consistent with the measured reaction yield curves. Calculations of the depth resolution of this resonance and that of the 340 keV resonance in the (19)F(p, alpha gamma)(16)O reaction are compared for a specific target. (C) 1998 Elsevier Science B.V.

引用

页码：528 / 532

页数：5

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