Design of vacuum arc-based sources

被引：37

作者：

Coll, BF

Sanders, DM

机构：

[1] LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94551

[2] MOTOROLA PHOENIX CORP RES LAB,PHOENIX,AZ

来源：

SURFACE & COATINGS TECHNOLOGY | 1996年 / 81卷 / 01期

关键词：

physical vapor deposition; vacuum arc sources; source design; cathodic arc; tribological coatings;

D O I：

10.1016/0257-8972(95)02654-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Vacuum are sources can produce copious quantities of ions which can be used to engineer surfaces for tribological applications. The energetic and ionic character of are-produced coating species can lead to unusually hard, dense, slippery and/or adherent coatings which can be applied successfully to both flat surfaces and complex shapes. Are coating technology can take many forms with each having their own advantages and limitations. The purpose of the current review is to give the reader an overview of the wide range of options which are possible with vacuum are technology while providing specific detailed examples to show how several of these option sets translate into actual sourer designs. Emphasis is given to more recent findings.

引用

页码：42 / 51

页数：10

共 41 条

[1] REDUCTION IN MACROPARTICLES DURING THE DEPOSITION OF TIN FILMS PREPARED BY ARC ION PLATING [J].