Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

被引：35

作者：

Chiu, HT ^{[1
]}

Chuang, SH

Tsai, CE

Lee, GH

Peng, SM

机构：

[1] Natl Chiao Tung Univ, Dept Appl Chem, Hsinchu 30050, Taiwan

[2] Natl Taiwan Univ, Dept Chem, Taipei 10764, Taiwan

来源：

POLYHEDRON | 1998年 / 17卷 / 13-14期

关键词：

organoimide complexes; tantalum complexes; CVD precursors;

D O I：

10.1016/S0277-5387(98)00051-5

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

New single-source precursor to tantalum nitride thin films, ((BuN)-N-t)Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr-n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes (R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The structure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallography. (C) 1998 Elsevier-Science Ltd. All rights reserved.

引用

页码：2187 / 2190

页数：4

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