On the bending of unconstrained thin crystalline plates caused by the change in surface stress

被引:18
作者
He, LH
Lim, CW [1 ]
机构
[1] Univ Sci & Technol China, Dept Modern Mech, Hefei 230026, Anhui, Peoples R China
[2] City Univ Hong Kong, Dept Bldg & Construct, Kowloon, Hong Kong, Peoples R China
关键词
surface stress; single crystal surfaces; bending of surfaces; epitaxy;
D O I
10.1016/S0039-6028(01)00953-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The current technique of measuring the change in surface stress at the solid-vacuum and solid-liquid interface is typically based on the bending of a thin crystalline plate. The crucial issue is to convert the measured data such as curvature or deflection into the change in surface stress with the help of elasticity theory. In this paper, explicit relations are derived between the change in surface stress and the curvature of an unconstrained plate with arbitrary crystallographic symmetry. The result is exact in the sense that it satisfies all the relevant equations in elasticity, except the boundary conditions on the lateral edge are fulfilled on average. In addition, it is also shown that some existing results for surface stress induced bending of free isotropic and cubic plates are actually exact, although some kinetic assumptions are adopted in their derivation. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:203 / 210
页数:8
相关论文
共 16 条
[1]   CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J].
BRANTLEY, WA .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) :534-535
[2]   SURFACE AND INTERFACE STRESS EFFECTS IN THIN-FILMS [J].
CAMMARATA, RC .
PROGRESS IN SURFACE SCIENCE, 1994, 46 (01) :1-38
[3]   Bending of crystalline plates under the influence of surface stress - a finite element analysis [J].
Dahmen, K ;
Lehwald, S ;
Ibach, H .
SURFACE SCIENCE, 2000, 446 (1-2) :161-173
[4]   Measurement of surface stress: Description of an interferometric method [J].
Degand, G ;
Muller, P ;
Kern, R .
SURFACE REVIEW AND LETTERS, 1997, 4 (05) :1047-1050
[5]   The role of surface stress in reconstruction, epitaxial growth and stabilization of mesoscopic structures [J].
Ibach, H .
SURFACE SCIENCE REPORTS, 1997, 29 (5-6) :195-263
[6]   ON THE INFLUENCE OF THERMAL EFFECTS ON INTERNAL-STRESS MEASUREMENTS DURING AND AFTER DEPOSITION OF SILVER, GOLD AND COPPER-FILMS [J].
KOCH, R ;
ABERMANN, R .
THIN SOLID FILMS, 1985, 129 (1-2) :63-70
[7]   THE INTRINSIC STRESS OF POLYCRYSTALLINE AND EPITAXIAL THIN METAL-FILMS [J].
KOCH, R .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1994, 6 (45) :9519-9550
[8]   ABOUT THE MEASUREMENT OF ABSOLUTE ISOTROPIC SURFACE STRESS OF CRYSTALS [J].
MULLER, P ;
KERN, R .
SURFACE SCIENCE, 1994, 301 (1-3) :386-398
[9]  
NYE JF, 1972, PHYSICAL PROPERTIES
[10]  
ROLL K, 1976, J APPL PHYS, V47, P3224, DOI 10.1063/1.323119