Measurement of surface stress: Description of an interferometric method

被引:5
作者
Degand, G [1 ]
Muller, P [1 ]
Kern, R [1 ]
机构
[1] Ctr Rech Mecanismes Croissance Cristalline, F-13288 Marseille 9, France
关键词
D O I
10.1142/S0218625X97001279
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In a recent publication, we proposed a new experimental method for measuring the absolute surface stress of a thin crystalline sheet based on the deformation of very thin sheets (thickness e < 10 mu m) submitted to disymmetrical surface stresses (S-1 on one side of the sheet, S-2 on the other). This paper demonstrates that Michelson interferometry can be used to measure a surface stress change of 2-3 10(-3) J.m(-2) if the thickness and the Young modulus of the sheet are accurately known. Using a silicon substrate sample we found that one fourth of a monolayer of silver reduces the surface stress by 0.45 J.m(-2).
引用
收藏
页码:1047 / 1050
页数:4
相关论文
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