Formation of Au nanostructures through an alumina mask by laser-assisted deposition

We report a new method to produce ordered arrays of metal nanostructures on substrates. The method employs a through-hole nanoporous alumina membrane as a mask that is attached onto the substrate, silicon in this study. The material of deposition, Au in this study, was provided by pulsed laser ablation of a target gold. At an early stage of the deposition, a significant portion of Au penetrated the alumina through-holes and formed an ordered nanodot array on the silicon surface. At the later stage, the through-hole deposition was blocked by the growth of Au film on the top surface of the alumina, so that the heights of the Au nanodots were limited to about 10 nm under current experimental conditions. Subsequent attempts to clean up the top surface of the alumina with a lower power laser illumination resulted in the formation of new nanostructures around the alumina pores, nanospheres, or nanorings, depending on the fluence of the laser and the duration of the cleanup. We will discuss the underlying mechanism of the formation of these nanostructures.