Preparation of Ba(Ti,Zr)O3 thick films on silicon substrate by screen printing

BaTi0.975Zr0.025O3 thick films were prepared by a screen-printing method on Pt bottom electrodes using silicon substrates in the firing temperature range from 1330degreesC to 1370degreesC. The high-temperature sintering of Pt bottom electrodes and Ba(Ti,Zr)O-3 thick films was successfully achieved using silicon substrates with a fairly thick oxide layer. The ferroelectric and piezoelectric properties of the thick films were examined. The remanent polarization of the thick films increased with increasing firing temperature. A remanent polarization of 13.8 muC/cm(2) for a Ba(Ti,Zr)O-3 thick film was obtained at a firing temperature of 1370degreesC. The longitudinal piezoelectric constant d(33) calculated from a unipolar signal (10kV/cm, 1 Hz) curve was 610 pC/N for the thick film fired at 1370degreesC.