共 32 条
[2]
BELL AT, 1974, TECHNIQUES APPLICATI, pCH10
[5]
RELATION OF POLYMER STRUCTURE TO PLASMA-ETCHING BEHAVIOR - ROLE OF ATOMIC FLUORINE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:1578-1584
[10]
COBURN JW, 1989, PLASMA DIAGNOSTICS, V2, pCH1