Polishing of polycrystalline diamond by the technique of dynamic friction. Part 2: Material removal mechanism

被引：81

作者：

Chen, Y. ^{[1
]}

Zhang, L. C. ^{[1
]}

Arsecularatne, J. A. ^{[1
]}

机构：

[1] Univ Sydney, Sch Aerosp Mech & Mechatron Engn, Sydney, NSW 2006, Australia

来源：

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 2007年 / 47卷 / 10期

基金：

澳大利亚研究理事会;

关键词：

dynamic friction polishing; polycrystalline diamond; material removal mechanism;

D O I：

10.1016/j.ijmachtools.2006.11.003

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper investigates the material removal mechanisms of PCD using the dynamic friction polishing technique. Scanning electron microscopy, energy dispersive X-ray, X-ray diffraction and Raman spectroscopy were used to identify the mechanisms by analyzing the specimen surfaces and debris produced by polishing. It was found that the material removal occurred in a rather complex way, which can be a chemo-mechanical process, diffusion, oxidization and evaporation, or their combinations. (C) 2006 Elsevier Ltd. All rights reserved.

引用

页码：1615 / 1624

页数：10

共 45 条

[21] Micro-Raman study of SiC fibre oxide matrix reaction [J].

Karlin, S ;

Colomban, P .

COMPOSITES PART B-ENGINEERING, 1998, 29 (01) :41-50

[22] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].

KNIGHT, DS ;

WHITE, WB .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :385-393

[23] A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates [J].

Malshe, AP ;

Park, BS ;

Brown, WD ;

Naseem, HA .

[24]

Nakashima S, 1997, PHYS STATUS SOLIDI A, V162, P39, DOI 10.1002/1521-396X(199707)162:1<39::AID-PSSA39>3.0.CO

[25]

2-L

[26] Raman scattering of disordered SiC [J].

Nakashima, S ;

Kisoda, K ;

Niizuma, H ;

Harima, H .

PHYSICA B-CONDENSED MATTER, 1996, 219-20 :371-373

[27] ROLE OF MICROSTRUCTURE ON THE OXIDATION BEHAVIOR OF MICROWAVE PLASMA SYNTHESIZED DIAMOND AND DIAMOND-LIKE CARBON-FILMS [J].

NIMMAGADDA, RR ;

JOSHI, A ;

HSU, WL .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2445-2450

[28] Raman spectrum of silicon nanowires [J].

Piscanec, S ;

Ferrari, AC ;

Cantoro, M ;

Hofmann, S ;

Zapien, JA ;

Lifshitz, Y ;

Lee, ST ;

Robertson, J .

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2003, 23 (6-8) :931-934

[29]

RUTLEDGE KM, 1997, HDB IND DIAMONDS DIA, P413

[30] Thermo-chemical wear mechanism of diamond tool in machining of ferrous metals [J].

Shimada, S ;

Tanaka, H ;

Higuchi, M ;

Yamaguchi, T ;

Honda, S ;

Obata, K .

CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2004, 53 (01) :57-60

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