Experimental verification of the nature of the high energy tail in the electron energy distribution in n-channel MOSFETs

被引:8
作者
Anil, KG [1 ]
Mahapatra, S
Eisele, I
机构
[1] Univ Bundeswehr Munich, Fac Elect Engn, Inst Phys, D-85579 Neubiberg, Germany
[2] Agere Syst, Murray Hill, NJ 07974 USA
关键词
electron-electron interactions; electron energy distribution; hot-carrier; impact ionization; Monte-Carlo simulation; MOSFET; silicon; thermal tail;
D O I
10.1109/55.954917
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Sensitive quantum-yield measurements (M) on n-channel MOSFETs for drain voltages (V-D) near the bandgap voltage of silicon, showed an abnormal bell-shaped M versus gate voltage (V-G) characteristic at 77 K. At higher V-D, M decreases monotonously with increasing V-G. Measured data is interpreted based on the general nature of electron energy distribution published by Monte-Carlo simulation groups and provide simultaneous experimental verification for the presence of a tail that depends strongly on lattice temperature and electron-electron interaction (EEI) broadening of the tail. Our data suggest EEI broadening of the tail even in the subthreshold regime.
引用
收藏
页码:478 / 480
页数:3
相关论文
共 17 条
[1]  
Abramo A, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P301, DOI 10.1109/IEDM.1995.499201
[2]   A MULTIBAND MONTE-CARLO APPROACH TO COULOMB INTERACTION FOR DEVICE ANALYSIS [J].
ABRAMO, A ;
BRUNETTI, R ;
JACOBONI, C ;
VENTURI, F ;
SANGIORGI, E .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (10) :5786-5794
[3]   Role of inversion layer quantization on sub-bandgap impact ionization in deep-sub-micron n-channel MOSFETs [J].
Anil, KG ;
Mahapatra, S ;
Eisele, I .
INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST, 2000, :675-678
[4]  
ANIL KG, 2000, P 30 EUR SOL STAT RE, P124
[5]   Monte Carlo simulation of the CHISEL flash memory cell [J].
Bude, JD ;
Pinto, MR ;
Smith, RK .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (10) :1873-1881
[6]   One-dimensional solution of the Boltzmann transport equation including electron-electron interactions [J].
Childs, PA ;
Leung, CCC .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (01) :222-227
[7]   Bias and temperature dependence of homogeneous hot-electron injection from silicon into silicon dioxide at low voltages [J].
Fischer, B ;
Ghetti, A ;
Selmi, L ;
Bez, R ;
Sangiorgi, E .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1997, 44 (02) :288-296
[8]  
Fischetti MV, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P305, DOI 10.1109/IEDM.1995.499202
[9]   Long-range Coulomb interactions in small Si devices. Part I: Performance and reliability [J].
Fischetti, MV ;
Laux, SE .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (02) :1205-1231
[10]   Low-voltage hot electrons and soft-programming lifetime prediction in nonvolatile memory cells [J].
Ghetti, A ;
Selmi, L ;
Bez, RT .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (04) :696-702