Chemical vapor deposition of single-walled carbon nanotubes using ultrathin Ni/Al film as catalyst

被引：99

作者：

Zhang, RY

Amlani, L

Baker, J

Tresek, J

Tsui, RK

机构：

[1] Motorola Labs, Phys Sci Res Labs, Tempe, AZ 85284 USA

[2] Motorola Inc, Digital DNA Lab, Semicond Prod Sector, Tempe, AZ 85284 USA

来源：

NANO LETTERS | 2003年 / 3卷 / 06期

关键词：

D O I：

10.1021/nl034154z

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Chemical vapor deposition (CVD) of single-walled carbon nanotubes (SWNTs) catalyzed using a few nm thick Ni layer supported by a thin Al underlayer is reported. Analysis by transmission electron microscopy shows the SWNTs having a diameter distribution between 1.5 and 2.8 nm. The effect of the Ni/Al bilayer film thickness on the density of the SWNTs is presented. Additionally, circuits of SWNTs bridging opposing Au electrodes coated with Ni/Al catalyst films are fabricated using selective CVD. The current-voltage characteristics and circuit resistance of the nanotube circuits are also discussed.

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页码：731 / 735

页数：5

相关论文

共 12 条

[1] COBALT-CATALYZED GROWTH OF CARBON NANOTUBES WITH SINGLE-ATOMIC-LAYERWALLS [J].

BETHUNE, DS ;

KIANG, CH ;

DEVRIES, MS ;

GORMAN, G ;

SAVOY, R ;

VAZQUEZ, J ;

BEYERS, R .

NATURE, 1993, 363 (6430) :605-607

[2] Carbon nanotubes: Synthesis, integration, and properties [J].

Dai, HJ .

ACCOUNTS OF CHEMICAL RESEARCH, 2002, 35 (12) :1035-1044

[3] Multiwalled carbon nanotubes by chemical vapor deposition using multilayered metal catalysts [J].

Delzeit, L ;

Nguyen, CV ;

Chen, B ;

Stevens, R ;

Cassell, A ;

Han, J ;

Meyyappan, M .

JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (22) :5629-5635

[4] Multilayered metal catalysts for controlling the density of single-walled carbon nanotube growth [J].

Delzeit, L ;

Chen, B ;

Cassell, A ;

Stevens, R ;

Nguyen, C ;

Meyyappan, M .

CHEMICAL PHYSICS LETTERS, 2001, 348 (5-6) :368-374

[5] Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems [J].

Franklin, NR ;

Wang, Q ;

Tombler, TW ;

Javey, A ;

Shim, M ;

Dai, HJ .

APPLIED PHYSICS LETTERS, 2002, 81 (05) :913-915

[6] Catalytic growth of single-wall carbon nanotubes from metal particles [J].

Hafner, JH ;

Bronikowski, MJ ;

Azamian, BR ;

Nikolaev, P ;

Rinzler, AG ;

Colbert, DT ;

Smith, KA ;

Smalley, RE .

CHEMICAL PHYSICS LETTERS, 1998, 296 (1-2) :195-202

[7] Chemical vapor deposition of methane for single-walled carbon nanotubes [J].

Kong, J ;

Cassell, AM ;

Dai, HJ .

CHEMICAL PHYSICS LETTERS, 1998, 292 (4-6) :567-574

[8] Synthesis of large arrays of well-aligned carbon nanotubes on glass [J].

Ren, ZF ;

Huang, ZP ;

Xu, JW ;

Wang, JH ;

Bush, P ;

Siegal, MP ;

Provencio, PN .

SCIENCE, 1998, 282 (5391) :1105-1107

[9] Crystalline ropes of metallic carbon nanotubes [J].

Thess, A ;

Lee, R ;

Nikolaev, P ;

Dai, HJ ;

Petit, P ;

Robert, J ;

Xu, CH ;

Lee, YH ;

Kim, SG ;

Rinzler, AG ;

Colbert, DT ;

Scuseria, GE ;

Tomanek, D ;

Fischer, JE ;

Smalley, RE .

SCIENCE, 1996, 273 (5274) :483-487

[10]

WEI B, 2000, APPL PHYS LETT, V77, P2958