AuBe Ohmic contacts to p-type ZnTe

被引:2
作者
Lan, WH [1 ]
Lin, WJ
Cheng, YC
Tai, K
Tasi, CM
Wu, PH
Cheng, KH
Chou, ST
Yang, CM
Cheng, YC
Huang, KF
机构
[1] Chung Shan Inst Sci & Technol, Mat R&D Ctr, Tao Yuan 325, Taiwan
[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan
[3] Natl Taiwan Ocean Univ, Inst Electroopt Sci, Keelung 202, Taiwan
[4] Chung Cheng Inst Technol, Dept Elect Engn, Tao Yuan 335, Taiwan
[5] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 300, Taiwan
关键词
D O I
10.1049/el:19981563
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ohmic contacts of AuBe to p-ZnTe show a minimum specific contact resistance of 3.0 x 10(-6) Ohm cm(2) for a p-doping level of 1.6 x 10(19) cm(-3) and at an annealing temperature of 200 degrees C. The beryllium is very effective at improving the electrical properties of p-type contacts to ZnTe.
引用
收藏
页码:2434 / 2435
页数:2
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