Position-controlled carbon fiber growth catalyzed using electron beam-induced chemical vapor deposition ferrocene nanopillars

被引:7
作者
Mukawa, T
Okada, S
Kobayashi, R
Fujita, J
Ishida, M
Ichihashi, T
Ochiai, Y
Kaito, T
Matsui, S
机构
[1] Japan Sci & Technol Co, CREST, JST, Kawaguchi, Saitama 3320012, Japan
[2] Univ Tsukuba, Inst Phys Appl, Tsukuba, Ibaraki 3058573, Japan
[3] NEC Corp Ltd, Fundamental & Environm Res Labs, Tsukuba, Ibaraki 3058501, Japan
[4] SII Nanotechnol Inc, Shizuoka 4101393, Japan
[5] Univ Hyogo, Grad Sch Sci, LASTI, Ako, Hyogo 6781205, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 7B期
关键词
amorphous; carbon; CVD; graphitize; nanotube; position;
D O I
10.1143/JJAP.44.5639
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrated nanotube growth on a position-controlled catalyst using electron beam-induced chemical vapor deposition (EB-CVD) ferrocene nanopillars. While solid phase graphitization was induced at 650 degrees C, iron nanoparticles only appeared on the surface by eroding the surrounding graphite triggered by the gas phase carbon fiber growth, at a temperature higher than 800 degrees C using ethanol vapor. The precise position control achieved by EB-CVD directly reflected that of carbon fiber growth, which is a promising position-controlled carbon nanotube growth method for future device applications.
引用
收藏
页码:5639 / 5641
页数:3
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